產品資訊
厚度量測設備（TMS）
MTA-100
▪ Fully Auto Thickness Measurement System
▪ Laser Displacement Sensor
▪ Multi Magazine Loading / Unloading
▪ Scan Area: 300X200(mm)
▪ External Dimension: 840X1150X1960(mm)
MIT-T700
▪ Point Thickness Measurement System
▪ Accuracy: ±1um
▪ Resolution: 0.25um
▪ Spot Size(Diameter): ø500um
▪ System Dimension: 2660X1890X2260mm
▪ 應用領域（Application）: AMB, DCB, Power Module, 其他積層元件